| 摘要 |
PROBLEM TO BE SOLVED: To provide a dispensing apparatus for obtaining high processing efficiency, accurately dispensing and effectively utilizing a space above a working area where dispensing heads move. SOLUTION: The dispensing apparatus 1 has a body 2 and the first and second dispensing heads 3a, 3b having nozzle mounts where nozzle chips are detachably mounted. The first and second dispensing heads 3a, 3b are supported on first and second arms 11a, 11b and independently move in the x-axis direction and the y-axis direction. Dispensing pumps for increasing and decreasing internal pressure of the mounted nozzles are installed in the first and second dispensing heads 3a, 3b. COPYRIGHT: (C)2004,JPO |
