发明名称 Strain detector and pressure sensor
摘要 A thin-film resistor (5) provided on a strain-generating part (2) via an insulating film (4) and an electrode thin-film (6) including an electrode pad (10) arranged in the thin-film resistor (5) are provided. The thin-film resistor (5) includes a strain-detecting thin-film resistive part (8) and an electrode connection (9) connected to the resistive part (8). The electrode connection (9) is formed to extend to the electrode pad (10). The electrode pad (10) includes an external-connection bonding area (12) and a testing probe area (13) formed at different positions. The electrode pad (10) is disposed on a tubular rigid body (1) provided at the outer peripheral edge of a strain-generating part (2).
申请公布号 EP1571434(A3) 申请公布日期 2006.05.31
申请号 EP20050251162 申请日期 2005.02.28
申请人 NAGANO KEIKI CO., LTD. 发明人 YOSHIDA, NAOKI;KODAMA HIROSHI;NAGASAKA HIROSHI
分类号 G01L9/04;G01L1/22;G01L9/00;H01L29/84 主分类号 G01L9/04
代理机构 代理人
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