发明名称 SELF ALIGNED COMPACT BIPOLAR JUNCTION TRANSISTOR LAYOUT, AND METHOD OF MAKING SAME
摘要 THE INVENTION RELATES TO A PROCESS OF FORMING A BIPOLAR JUNCTION TRANSISTOR (10) (BJT) THAT INCLUDES FORMING A TOPOLOGY OVER A SUBSTRATE (112). THEREAFTER ,A SPACER IS FORMED AT THE TOPOLOGY. A BASE LAYER IS FORMED FROM EPITAXIAL SILICON ABOVE THE SPACER AND AT THE TOPOLOGY. A LEAKAGE BLOCK STRUCTURE (158) IS FORMED IN THE SUBSTRATE (112) BY OUT- DIFFUSION FROM THE SPACER. THEREAFTER A BJT IS COMPLETED WITH THE BASE LAYER AND THE SPACER.
申请公布号 MY122957(A) 申请公布日期 2006.05.31
申请号 MYPI20024598 申请日期 2002.12.09
申请人 INTEL CORPORATION 发明人 AHMED, SHAHRIAR;BOHR, MARK;CHAMBERS, STEPHEN;GREEN, RICHARD;MURTHY, ANAND
分类号 H01L21/331 主分类号 H01L21/331
代理机构 代理人
主权项
地址