发明名称 Bi-directionally actuated thin membrane mirror
摘要 A deformable membrane mirror and a related method for its use, the mirror including a deformable membrane having a reflective front face and a back face, and further including electrodes located on both sides of the membrane, to provide a desired surface contour without imparting a concave bias to the membrane. The electrodes include a first set of electrodes spaced from the back face of the membrane, and at least one additional electrode spaced from the front face of the membrane.
申请公布号 EP1662290(A1) 申请公布日期 2006.05.31
申请号 EP20050256743 申请日期 2005.10.31
申请人 NORTHROP GRUMMAN CORPORATION 发明人 HO, JAMES G.
分类号 G02B26/08 主分类号 G02B26/08
代理机构 代理人
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