Method for producing a spiral inductance on a substrate, and a device fabricated according to such a method

摘要

A device and a method for producing such a device is provided, whereby the windings of a spiral inductance are embedded in a membrane such that they are freely suspended over a completely back-etched area of the substrate for a decoupling of the windings from the substrate. An additional substrate is connected to the bottom side of the back-etched area of the processed substrate such that a hollow cavity is formed for a decoupling of the windings from the substrate.