发明名称 Short-channel Schottky-barrier MOSFET device and manufacturing method
摘要 A MOSFET device and method of fabricating are disclosed. The present invention utilizes Schottky barrier contacts for source and/or drain contact fabrication within the context of a MOSFET device structure to eliminate the requirement for halo/pocket implants and shallow source/drain extensions to control short channel effects. Additionally, the present invention unconditionally eliminates the parasitic bipolar gain associated with MOSFET fabrication, reduces manufacturing costs, tightens control of device performance parameters, and provides for superior device characteristics as compared to the prior art.
申请公布号 US7052945(B2) 申请公布日期 2006.05.30
申请号 US20030360194 申请日期 2003.02.07
申请人 SPINNAKER SEMICONDUCTOR, INC. 发明人 SNYDER JOHN P.
分类号 H01L21/00;H01L29/417;H01L21/336;H01L21/8234;H01L27/095;H01L29/76;H01L29/78 主分类号 H01L21/00
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