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发明名称
Apparatus and method for cleaning wafer anticipatable fault of pump
摘要
申请公布号
KR100585091(B1)
申请公布日期
2006.05.30
申请号
KR20030037860
申请日期
2003.06.12
申请人
发明人
分类号
H01L21/304;F04B51/00;H01L21/00
主分类号
H01L21/304
代理机构
代理人
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地址
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