SPIN COATER WITH AUTO CONTROL FUNCTION OF THICKNESS DEVIATION AND SPIN COATING METHOD USING IT,申请号KR20040043025-传众专利搜索

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发明名称	SPIN COATER WITH AUTO CONTROL FUNCTION OF THICKNESS DEVIATION AND SPIN COATING METHOD USING IT
摘要
申请公布号	KR100585019(B1)	申请公布日期	2006.05.30
申请号	KR20040043025	申请日期	2004.06.11
申请人		发明人
分类号	B05C11/08	主分类号	B05C11/08
代理机构		代理人
主权项
地址

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