Method for modifying coma aberration of an exposing apparatus,申请号KR20000010380-传众专利搜索

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发明名称	Method for modifying coma aberration of an exposing apparatus
摘要
申请公布号	KR100585081(B1)	申请公布日期	2006.05.30
申请号	KR20000010380	申请日期	2000.03.02
申请人		发明人
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
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