THE MANUFACTURING METHOD OF GAS-INJECTOR CERAMIC TUBE USED IN CEMICONDUCTOR-MAKING,申请号KR20040040037-传众专利搜索

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发明名称	THE MANUFACTURING METHOD OF GAS-INJECTOR CERAMIC TUBE USED IN CEMICONDUCTOR-MAKING
摘要
申请公布号	KR100585402(B1)	申请公布日期	2006.05.30
申请号	KR20040040037	申请日期	2004.06.02
申请人		发明人
分类号	H01L21/02	主分类号	H01L21/02
代理机构		代理人
主权项
地址

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