发明名称 |
Standard sample for transmission electron microscope (TEM) elemental mapping and TEM elemetal mapping method using the same |
摘要 |
A standard sample for transmission electron microscopy (TEM) elemental mapping and a TEM elemental mapping method using the same are provided. The standard sample includes a substrate; a first crystalline thin film containing heavy atoms formed on the substrate; a first amorphous thin film having oxides or nitrides containing light atoms and having a thickness of 1-5 nm or 6-10 nm formed on the first crystalline thin film; a second crystalline thin film containing heavy atoms formed on the first amorphous thin film. The standard sample can be used to correct TEM, EDS and EELS mapping results of a multi-layered nanometer-sized thin film and to optimize mapping conditions.
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申请公布号 |
US7053372(B2) |
申请公布日期 |
2006.05.30 |
申请号 |
US20050034721 |
申请日期 |
2005.01.14 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CO. |
发明人 |
PARK GYEONG-SU;KAJI KAZUTOSHI;PARK JONG-BONG;TERADA SHOHEI;HIRANO TATSUMI;SONG SE-AHN |
分类号 |
G01N23/02;G01N23/04;G01N1/28;G01N23/08;G01N33/04;H01J37/26 |
主分类号 |
G01N23/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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