Surface acoustic wave sensor

摘要

A Surface Acoustic Wave (SAW) Device that includes a substrate formed from a material selected from the LGX family of crystals and having a SAW propagation surface defined by Euler angles relative to the corresponding crystal axes having a range of -5°<phi<+5°, -5°<theta<50° and 80°<psi<100°. The device being utilized for liquid sensor applications including the detection of chemical or biological agents present in a liquid environment. The device may or may not include the deposition of one or more chemical and/or biological films upon the propagation surface to enhance the sensitivity thereof. At least one interdigital transducer is formed upon the substrate propagation surface and that is operative to launch surface acoustic waves having a shear horizontal mode.