| 发明名称 |
Sacrificial compositions, methods of use thereof, and methods of decomposition thereof |
| 摘要 |
Polymers, methods of use thereof, and methods of decomposition thereof, are provided. One exemplary polymer, among others, includes, a composition having a sacrificial polymer and a photoacid generator.
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| 申请公布号 |
US7052821(B2) |
申请公布日期 |
2006.05.30 |
| 申请号 |
US20030699330 |
申请日期 |
2003.10.31 |
| 申请人 |
GEORGIA TECH RESEARCH CORPORATION |
发明人 |
KOHL PAUL A.;JOSEPH PAUL JAYACHANDRAN;REED HOLLIE;BIDSTRUP-ALLEN SUE;WHITE CELESTA E.;HENDERSON CLIFFORD |
| 分类号 |
G03F1/14;B81B1/00;B81C1/00;G03F7/039;H01L21/768 |
主分类号 |
G03F1/14 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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