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发明名称
METHOD FOR ETCHING GATE INSULATE FILM OF HIGH VOLTAGE DEVICE
摘要
申请公布号
KR100587391(B1)
申请公布日期
2006.05.30
申请号
KR20040109609
申请日期
2004.12.21
申请人
DONGBU ELECTRONICS CO., LTD.
发明人
JUNG, SOON WOOK
分类号
H01L21/311
主分类号
H01L21/311
代理机构
代理人
主权项
地址
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