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发明名称
FABRICATING METHOD OF FERROELECTRIC CAPACITOR IN SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100584998(B1)
申请公布日期
2006.05.29
申请号
KR20030098503
申请日期
2003.12.29
申请人
发明人
分类号
H01L27/105
主分类号
H01L27/105
代理机构
代理人
主权项
地址
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