| 摘要 |
FIELD: integral electronics and micro-system engineering, in particular, engineering of integral elements, meant for changing direction of optical signal. ^ SUBSTANCE: construction of mirror additionally includes four electrodes of capacitive movement transformers, positioned on substrate in such a way, that they form a flat capacitor together with mirror element due to their overlapping, and two additional torsion beams, made of semiconductor material and connecting mirror element to supports; torsion beams are positioned within limits of lesser gaps of mirror element. Substrate, mirror element, torsion beams, electrodes of electrostatic drives and capacitive transformers of movements and supports are made of semiconductor material. ^ EFFECT: decreased area of substrate used to position integral micromechanical mirror, and possible control over position of mirror element relatively to said substrate. ^ 2 dwg |
