A method for determining parameters for lithographic projection, a computer system and computer program therefor, a method of manufacturing a device and a device manufactured thereby
摘要
申请公布号
SG121840(A1)
申请公布日期
2006.05.26
申请号
SG20030007226
申请日期
2003.12.08
申请人
ASML NETHERLANDS B.V.
发明人
EURLINGS MARKUS FRANCISCUS ANTONIUS;KOOLEN ARMAND EUGENE ALBERT
