SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS AND LIQUID CRYSTAL DISPLAY DEVICE

摘要

[PROBLEMS] To prevent a substrate (p) from being continuously processed in a status where the substrate (p) is shifted from a prescribed position and a peripheral part of the substrate (p) is placed over a locking means (32), when the substrate (p) is held by permitting the peripheral part of the substrate (p) placed at the prescribed position on a holding member (30) to be sandwiched by a plurality of locking means (32) with the holding member (30). [MEANS FOR SOLVING PROBLEMS] A substrate holding apparatus is provided with a plurality of detecting means (80) arranged to detect the peripheral part of the substrate (p) when the substrate (p) is arranged at the prescribed position on the holding member (30), and a judging means (90) for judging that the substrate (p) is shifted from the prescribed position when at least one detecting means (80) among the detecting means (80) did not detect a corresponding part of the substrate (p).