DEFECT REPAIR DEVICE AND DEFECT REPAIR METHOD

摘要

A defect repair device (40) includes a defect inspection unit (45) configured to find a size of a protruding defect on a front surface (23) of a multi-layer film (20) having a rear surface opposite to the front surface, a calculation unit (46) configured to calculate a repair energy so as to repair the protruding defect based on the size of the protruding defect found by the defect inspection unit (45), an energy supplier (41), and an energy controller (46) configured to control the energy supplier (41) to supply the repair energy calculated by the calculation unit to a portion in the multi-layer film (20) from the rear surface of the multi-layer film (20) so as to cause a decrease in a volume of the portion and retract the protruding defect into the multi-layer film (20).