发明名称 |
PROCESSING METHOD, PROCESSING APPARATUS, AND FINE STRUCTURE PRODUCED BY THE METHOD |
摘要 |
<p>A processing method by which a high-accuracy fine structure can be easily formed and which attains a low production cost. The method is characterized by comprising a step in which a thin film (1) made of a resin is set between a die (2) and a counter base (3); a step in which the thin resin film (1) between the die (2) and the counter base (3) is heated to a temperature not lower than the fluidization initiation temperature; and a step in which the thin resin film (1) having a temperature not lower than the fluidization initiation temperature is pressed between the die (2) and the counter base (3) to form through-holes therein.</p> |
申请公布号 |
WO2006054701(A1) |
申请公布日期 |
2006.05.26 |
申请号 |
WO2005JP21252 |
申请日期 |
2005.11.18 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD.;YORITA, JUN;HIRATA, YOSHIHIRO |
发明人 |
YORITA, JUN;HIRATA, YOSHIHIRO |
分类号 |
B29C67/20;A61M15/08;B01D39/16;B29C33/38;B41J2/135;C12M1/26;H05K3/00 |
主分类号 |
B29C67/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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