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发明名称
WAFER TRANSFER SYSTEM AND TRANSFER METHOD FOR LESSENING WAFER LOSS
摘要
申请公布号
KR20060057222(A)
申请公布日期
2006.05.26
申请号
KR20040096310
申请日期
2004.11.23
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
SHIM, WOO HYUK
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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