METHOD FOR IMPROVING STEP COVERAGE IN SEMICONDUCTOR MANUFACTURING PROCESS,申请号KR20040096366-传众专利搜索

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发明名称	METHOD FOR IMPROVING STEP COVERAGE IN SEMICONDUCTOR MANUFACTURING PROCESS
摘要
申请公布号	KR20060057274(A)	申请公布日期	2006.05.26
申请号	KR20040096366	申请日期	2004.11.23
申请人	DONGBU ELECTRONICS CO., LTD.	发明人	KIM, SU KON
分类号	H01L21/28	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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