NANO TWEEZERS AND SCANNING PROBE MICROSCOPE HAVING THE SAME

摘要

Nano tweezers (1), comprising a support body (25), an observation probe (10) projected from the support body (25) for observing the surface of a specimen, a movable arm (20) disposed parallel with the observation probe (10) projected from the support body (25) and opening and closing to hold and release the specimen on and from the observation probe (10), and a drive mechanism drivingly opening and closing the movable arm (20) from and to the observation probe (10). Each of the support body (25), the observation probe (10), and the movable arm (20) is manufactured by working a semiconductor wafer (30) by photolithography process. Thus, since the dimensional accuracy of the nano tweezers can be increased, the specimen can be accurately observed and securely held.