LIGHTING APPARATUS, EXPOSURE APPARATUS AND MICRO DEVICE MANUFACTURING METHOD

摘要

A lighting apparatus illuminates a plane (M) to be illuminated, with illuminating light projected from a light source (5). The lighting apparatus is provided with an entrance side reflection type fly's eye optical system (12) configured by arranging a plurality of reflection type partial optical systems in parallel; an outgoing side reflection type fly's eye optical system (14) configured by arranging a plurality of reflection type partial optical systems corresponding to each of the plurality of reflection type partial optical systems configuring the entrance side reflection type fly's eye optical system (12); and capacitor optical systems (18, 20) including two reflecting mirrors for guiding the illuminating light reflected by the outgoing side reflection type fly's eye optical system (14) to the plane (M). At least one of curvature centers of the two reflecting mirrors is optically decentered from a normal line at the center of a lighting area on the plane (M).