发明名称 |
SUBSTRATE CARRIER HAVING REDUCED HEIGHT |
摘要 |
A first substrate carrier is provided that includes a body adapted to store one or more substrates; and either (1) a bottom surface having one or more coupling features that extend into a storage region of the body or (2) coupling features that extend alongside the body, so that the substrate carrier's overall :height is not increased by the entire height of the coupling feature. Numerous other aspects are provided. |
申请公布号 |
WO2006029025(A3) |
申请公布日期 |
2006.05.26 |
申请号 |
WO2005US31427 |
申请日期 |
2005.09.02 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
ELLIOT, MARTIN, R.;RICE. MICHAEL, R. |
分类号 |
H01L21/00 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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