POSITION MEASUREMENT METHOD, POSITION CONTROL METHOD, MEASUREMENT METHOD, LOADING METHOD, EXPOSURE METHOD, EXOPOSURE APPARATUS, AND DEVICE PRODUCTION METHOD

摘要

A movable body (WST) has a plate (50), with a predetermined shape, removably mounted on it. A part of the plate (50) is detected by an alignment system (ALG) while the position of the movable body (WST) is measured by a measurement apparatus (18 etc.) that defines a movement coordinate system of the movable body (WST), and positional information on the outer peripheral edge of the plate (50) is obtained based on the result of the measurement by the measurement apparatus which result corresponds to the result of the detection by the alignment system (ALG). As a result, the position of the plate, which is the position of the movable body, can be managed on the movement coordinate system defined by the measurement apparatus even if the movable body (WST) has no mark (reference mark) etc. on its surface.