发明名称 SPECTROSCOPE
摘要 PROBLEM TO BE SOLVED: To eliminate a change in a incident position and an incident angle of the light on a surface for receiving the light from a spectroscope, even if a wave length for making spectral diffraction is changed, in the spectroscope for making the spectral diffraction of the light from an external part by any diffraction grating, by integrally rotating a plurality of reflection type diffraction gratings. SOLUTION: This spectroscope has an optical path changing mechanism 20 for changing an optical path of the light from a condensing mirror 16 for condensing the light from the diffraction grating positioned in a spectral diffraction possible position among the plurality of diffraction gratings 11a and 11b. The optical path changing mechanism 20 has a plane mirror 21 arranged in the vicinity of an image forming position by the condensing mirror 16, and a mirror rotating mechanism 22 for rotating this mirror 21. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006132968(A) 申请公布日期 2006.05.25
申请号 JP20040319324 申请日期 2004.11.02
申请人 NIKON CORP 发明人 SUGIYAMA KIWA
分类号 G01J3/18;G01J3/06 主分类号 G01J3/18
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