发明名称 Copper foil inspection device copper foil inspection method defect inspection device and defeat inspection method
摘要 A surface of copper foil wound onto a guide roller 26 is irradiated with light. Specular light from the copper foil surface is received by CCD cameras 14 a, and scattered light from the copper foil surface is received by CCD cameras 14 b. When, in a region in which the amount of specular light received by the CCD cameras 14 a is equal to or larger than a first threshold, a portion having a luminance equal to or larger than a second threshold is present, and when the amount of scattered light received by the CCD cameras 14 b is smaller than a luminance average, that region is determined to be a defective copper portion.
申请公布号 US2006109466(A1) 申请公布日期 2006.05.25
申请号 US20040498695 申请日期 2004.07.29
申请人 ZHOU QING W;FUJIWARA JUN;YAMABE KOJI;INOUE AYUMU 发明人 ZHOU QING W.;FUJIWARA JUN;YAMABE KOJI;INOUE AYUMU
分类号 G01N21/84;G01N21/892 主分类号 G01N21/84
代理机构 代理人
主权项
地址