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发明名称
SWITCH ASSEMBLY OF A EQUIPMENT FOR MANUFACTURING A SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
KR20060056479(A)
申请公布日期
2006.05.25
申请号
KR20040095580
申请日期
2004.11.22
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
YANG, HYUN SUK
分类号
H01L21/02;H01L21/027
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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