| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a simply structured field emitter array having no fine structure requiring extra fine processing, which can be formed by a simple manufacturing process, and its manufacturing method. <P>SOLUTION: In this field emitter array, a plurality of field emission type electron emitting elements to emit electrons from a material surface by impressing an electric field are disposed in an array shape, and the electron emitting element is equipped with a substrate and a diamond film formed on the substrate. A carbon nano material film, an electron donating group non-existing surface or an electron attractive group terminating surface are separately formed on the surface of the diamond film. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
