| 摘要 |
PROBLEM TO BE SOLVED: To prevent deviation of an attraction position when a disk to be transferred (slave disk) is attracted by a attraction chuck, after attraction, for example, when attraction is released. SOLUTION: A disk holding apparatus 42 is provided with an attraction chuck 42b for attracting either a master disk 46 having a magnetic pattern or a slave disk 40 to which the magnetic pattern is transferred, and a position deviation preventing guide 42c for preventing deviation of the attraction position when the disk is attracted and after the disk is attracted. COPYRIGHT: (C)2006,JPO&NCIPI
|
