| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing an electro-optical device by which substrates of the electro-optical device are prevented from becoming poor in electrical properties by reducing particles which are stuck to surfaces of the substrates when the substrates and pawls of a board to which the substrates are stacked vertically are slid when a thin film is deposited on each of substrates using a vertical film deposition furnace. SOLUTION: The method for manufacturing the electro-optical device includes a step of placing the substrates on substrate holding members for holding the substrates and depositing a thin film on each of the substrates in the film deposition furnace, wherein the method is characterized in that it includes the steps of: making the inside of the film deposition furnace vacuum; raising the pressure inside the film deposition furnace to a predetermined pressure; raising the temperature inside the film deposition furnace to a predetermined temperature after the pressure raising step; and depositing the thin film on each surface of the substrates in the film deposition furnace. COPYRIGHT: (C)2006,JPO&NCIPI
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