摘要 |
PROBLEM TO BE SOLVED: To provide a spectral responsivity measuring device and measuring method capable of performing measurement of an image sensor by removing the influence of luminance unevenness of input light and sensitivity unevenness of a detector itself, and a spectral irradiance calibration method of light source. SOLUTION: This device comprises a first spectrophotometer 1 provided with a white radiation light source 3, a first beam splitter 4, a first moving mirror 5 and a first fixed mirror 6; a second spectrophotometer 2 provided with an incident opening 12, a second beam splitter 13, a second moving mirror 15, a second fixed mirror 14 and a detector 16; an integrating sphere 7; an incident luminous flux switching converging mirror 11, and a black body radiation light source 9. The integrating sphere 7 receives output light of the first spectrophotometer 1, and the converging mirror 11 makes the output light of the integrating sphere 7 or the black body radiation light source 9 incident on the second spectrophotometer 2. When the output light of the integrating sphere 7 inputted to the second spectrophotometer 2 is measured by the detector 16, the second moving mirror 15 is fixed to a position of a long path difference. COPYRIGHT: (C)2006,JPO&NCIPI
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