| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a load port which has neither possibility of corruption occurrence, nor possibility of dust adhesion in conveyance of a sample. <P>SOLUTION: The load port is provided with a table 24 which is arranged on the front side of an air conveyance unit 5 and on which a container 15 storing the sample of an object to be processed is placed on the front side and a Boltz plate 16 which divides the inner part of the conveyance room 12 of the air conveyance unit 5 from outside. In the load port 9 taking out the sample from within the container 15 by an opening part formed in the Boltz plate 16 and storing the sample in the container 15, an exhaust duct 20 is installed below the opening along the back side of the Boltz plate 16, and atmosphere in the exhaust room 12 is exhausted into air by a fan 21. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
