| 摘要 |
PROBLEM TO BE SOLVED: To permit quicker and more secure access of a wafer frame storage box by using a first module to store the wafer frame storage box. SOLUTION: A storage cabinet apparatus is used for storage of a wafer frame storage box 21. The storage cabinet apparatus 20 includes a storage cabinet body 22, a first module 23 installed in the storage cabinet body 22 and storing the wafer frame storage box 21, and a control cabinet 24 installed in the storage cabinet body 22 and displaying the information on the use of the wafer frame storage box 21 by controlling the first module 23. COPYRIGHT: (C)2006,JPO&NCIPI |
