| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid control apparatus allowed to be easily installed, piped and wire-connected in a semiconductor manufacturing apparatus or the like, capable of reducing pressure loss due to piping connection, capable of easily changing the arrangement of respective modules, capable of suppressing the generation of corrosion even when corrosive fluid is used for fluid, capable of preventing slurry from being easily fixed even when the slurry is used, capable of changing the setting of a flow rate or cutting off a passage after piping, and capable of controlling the flow rate even when the fluid flowing into it ripples. SOLUTION: The fluid control apparatus is provided with: a flow meter sensor part 4 having an ultrasonic oscillator 12 for transmitting an ultrasonic wave into fluid and an ultrasonic oscillator 13 for receiving the ultrasonic wave transmitted from the ultrasonic oscillator 12 and outputting a signal to a flow meter amplification part 60; and an air driving type pinch valve 5 for controlling the flow rate of the fluid by operation pressure. At least the flow meter sensor part 4 and the air driving type pinch valve 5 are connected and installed in one casing 2 having a fluid inflow port 3 and a fluid outflow port 6. COPYRIGHT: (C)2006,JPO&NCIPI
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