HYDROGEN PERMEABLE MEMBRANE, MANUFACTURING METHOD THEREFOR AND APPARATUS EQUIPPED WITH HYDROGEN PERMEABLE MEMBRANE

摘要

PROBLEM TO BE SOLVED: To prevent the diffusion of a metal in a hydrogen permeable membrane while suppressing the fall of hydrogen permeability and durability of the hydrogen permeable membrane.

SOLUTION: The hydrogen permeable membrane 10 for selectively permeating hydrogen has a metal base layer 12 containing vanadium (V) and a metal coating layer 16 containing palladium (Pd). Further, the hydrogen permeable membrane 10 has an intermediate layer 13 which is the layer comprising a hydrogen permeable metal formed between the metal base layer 12 and metal coating layer 16 and characterized in that the particle size of the hydrogen permeable metal in a region (small particle size intermediate layer 15) other than the region in the vicinity of the metal base layer 12 is made smaller than that of the hydrogen permeable metal in a region (large particle size intermediate layer 14) in the vicinity of the metal base layer 12 including the contact surface with the metal base layer 12.

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