| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vacuum deposition system where, as a window layer for a semiconductor light emitting device, a current dispersion layer composed of a transparent electrically conductive film of metal oxide is formed, and simultaneously, its roughening is possible, to provide a filter utilized for the vacuum deposition system, and to provide a semiconductor light emitting device produced by using them. <P>SOLUTION: Regarding the constitution of the vacuum deposition system, the inside of a vacuum vessel 15 is placed with an evaporation source 14 of metal oxide and the substrates 11 to be deposited in which each face to be deposited is slantly fronted to the evaporation source in the upper part of the evaporation source, the space between the evaporation source 14 and the substrates 11 to be deposited is provided with a mechanically composed filter having many vacancies with fine diameters, and a vapor flow is passed therethrough, thus a roughened transparent electrically conductive film composed of metal oxide is formed on the face to be deposited in the substrate 11 to be deposited. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
