| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a plasma generator using a microwave preventing corrosion of a microwave window using a quartz plate. <P>SOLUTION: This plasma generator wherein microwave power is supplied in a plasma chamber 11 from the microwave window 22 of the quartz plate to generate plasma in the plasma chamber 11 is provided with the microwave window 22 constituted by gluing an alumina plate 24 which is chemically incorrodible to halogen plasma on one side face which is in the plasma chamber 11 of the quartz plate 23, and uses the microwave. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
