| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a process and an apparatus for producing coatings which allow a layer with defined mechanical properties to be applied to a front surface of a substrate with little contamination of a vacuum chamber. <P>SOLUTION: The process for applying the optical coating to a substrate, wherein a transition layer (12), which is used to match mechanical properties of a substrate (10) to mechanical properties of a layer system (16) to be applied upon the transition layer (12), is deposited on a front surface (20) of the substrate (10). For this purpose, during a sputtering process carried out in a vacuum chamber (18), reaction products (14) are incorporated at least virtually exclusively in the transition layer (12) on the substrate. This prevents other surfaces of the vacuum chamber (18) and the rear side (34) of the substrate (10) from being contaminated with the reaction products (14) and/or their precursors. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
