| 摘要 |
PROBLEM TO BE SOLVED: To provide a color light source for an aligner capable of being adapted to a compact color aligner which can irradiate color lights of red, green and blue in an overlapped manner to a continuously moving exposure object with a high degree of precision and without causing a color shift and image blurring. SOLUTION: The color light source is characterized by the fact that the irradiation of color lights is carried out to one edge face of a conversion means in such a manner that the colors are disposed in separated regions for each of a plurality of colors, the color lights enter the conversion means from the regions of the edge face separated for each color sequentially at different times for the respective colors, and they are outputted sequentially from the irradiation face of the conversion means at different times for the respective colors and irradiated to the exposure object. The plurality of colors are red, green and blue. COPYRIGHT: (C)2006,JPO&NCIPI
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