| 摘要 |
PROBLEM TO BE SOLVED: To provide a spatial optical modulation element in which high speed driving and high light utility efficiency are realized. SOLUTION: The spatial optical modulation element 20A comprises a base part 21 including a semiconductor substrate 22 for functioning as a fixed electrode, a pair of beam parts 24a and 24b furnished above the main surface of the base part 21, a mirror part 26 having a reflection face which reflects incident light 100, a pair of connection parts 25a and 25b which connect each of the pair of beam parts 24a and 24b and the mirror part 26, and a movable electrode 29b furnished on the upper face of the beam part 24b. In the spatial optical modulation element 20A, the movable electrode 29b is dislocated by electrostatic attraction force generated between the semiconductor substrate 22 functioning as a fixed electrode and the movable electrode 29b, accordingly the mirror part 26 is driven by the bending of the beam part 24b on which the movable electrode 29b is furnished and the bending of the pair of connection parts 25a and 25b, thus the angular modulation of the incident light 100 is performed. COPYRIGHT: (C)2006,JPO&NCIPI
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