| 摘要 |
PROBLEM TO BE SOLVED: To inspect operating conditions of pumps discharging two types of liquid flowing in one flow passage, in a low cost and simple method without using a complicated device. SOLUTION: One of the pumps is used as a reference pump, and supplies liquid to an inspection device at constant pressure. The other pump is used as a pump for inspection target. A condition of an interface formed by the two types of liquid flowing in the one flow passage 5 (micro channel) is detected, and based on the condition of the interface, the operating condition of the inspection target pump is inspected. COPYRIGHT: (C)2006,JPO&NCIPI
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