| 摘要 |
Mastering techniques are described that can improve the quality of a master used in data storage disk manufacturing. In one embodiment, the techniques include depositing a multi-layer structure adjacent a substrate layer of the master, the multi-layer structure including a first layer, a second layer formed over the first layer, and a third layer formed over the second layer, wherein the first layer comprises a substantially reflective base layer. The techniques also include defining a portable conformable mask (PCM) with the third layer, and defining a feature of the master in the second layer through the PCM of the third layer. In some embodiments, a nanometer scale topographical feature may be defined in the first layer of the master via an etching process or a thin film deposition.
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