发明名称 APPARATUS FOR PRODUCING DISTILLED WATER
摘要 PROBLEM TO BE SOLVED: To provide an apparatus for producing distilled water, the distilled water retained in which during the shutdown is not mixed in the distilled water to be produced newly after the start-up so that the newly produced distilled water can keep high cleanliness. SOLUTION: This apparatus for producing distilled water is provided with: a distillation unit; a condenser; a distilled water tank 33 for storing the distilled water 113 discharged from a final vaporizer and the distilled water 112 discharged from the condenser; a distilled water discharging pipe 34 for discharging distilled water 115 from the distilled water tank 33; a flowmeter 54 being a means for detecting the discharge amount of the distilled water 115; a discharge flow rate integrating unit 55; and a distilled water discharge controlling means 37 for: judging that the distilled water 115 is not clean and introducing the distilled water 115 into a pipeline 42 when the discharge amount of the distilled water 115, which is detected by the discharge flow rate integrating unit 55 and produced since the start-up of this apparatus for producing distilled water, is equal to or lower than a predetermined amount; and judging that the distilled water 115 is clean and introducing the distilled water 115 into another pipeline 45 when the discharge amount of the distilled water 115 is higher than the predetermined amount. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006130381(A) 申请公布日期 2006.05.25
申请号 JP20040319601 申请日期 2004.11.02
申请人 EBARA CORP 发明人 IRIE KIICHI;INOUE OSAYUKI;UCHIMURA TOMOYUKI
分类号 C02F1/04;B01D1/00;B01D1/26 主分类号 C02F1/04
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