POSITIONING CONTROL APPARATUS OF MOVABLE BODY, AND LASER BEAM MACHINE

摘要

PROBLEM TO BE SOLVED: To provide a positioning control apparatus of movable body capable of positioning of the movable body precisely at high speed even when a temperature of an actuator has changed, and to provide a laser beam machine for controlling the position of the movable body by the positioning control apparatus of the movable body.

SOLUTION: An internal parameter estimating instrument 17 of a current control circuit obtains an estimated torque constant 18 and an estimated coil resistance 19 from a coil applied voltage signal Vd applied to a coil (c) of a rotary actuator by the current control circuit 7 and a current detection signal id. Then, by a temperature estimating instrument 20, a temperature of the coil (c) is estimated from the estimated coil resistance 19, a modification amountΔΩ1 of a torsional oscillation frequency is obtained to compensate the torsional oscillation frequencyΩ1, and value of a loop gain 10 is modified by using the estimated torque constant 18.

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