| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical displacement sensor capable of high speed measurement by making the measurement capable under a certain control condition regardless of state of the measurement object. SOLUTION: The distance to the measurement object can be tetected from the distance between the peak positions of calculated light reception amount based on the information of the saturated image groups of both the sides by making the light reception amount of each pixel saturate by an image of the measurement object taken under a certain limited condition of light reception amount. The easily controllable and highly speedy measurement is realized because of the measurement becomes possible under a certain limited condition of light reception amount regardless of the state of the measurement object. COPYRIGHT: (C)2006,JPO&NCIPI
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