发明名称 MEASURING DEVICE
摘要 <p><P>PROBLEM TO BE SOLVED: To reduce a measurement error resulted from the thickness of refractive index of a sample. <P>SOLUTION: Terahertz pulse light L4 generated from a terahertz light generator 3 is converged by a first converging optical system composed of a parabolic mirror 9 and a condenser lens 10. A sample 100 is arranged in the vicinity of this converging position. Terahertz pulse light L5 made to dispersed luminous flux after converged by the first converging optical system is converged to a terahertz light detector 6 by a second converging optical system composed of a condenser lens 11 and a parabolic mirror 12. The optical axial position of the condenser lens 11 can be adjusted by a stage 13. A control/arithmetic processing part 7 controls the stage 13 so that the terahertz pulse light L5 transmitted by the sample 100 is focused to the terahertz light detector 6. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006133178(A) 申请公布日期 2006.05.25
申请号 JP20040325264 申请日期 2004.11.09
申请人 TOCHIGI NIKON CORP;NIKON CORP 发明人 TSUMURA NAOKI;FUKUSHIMA ITSUKI
分类号 G01N21/35;G01N21/3563;G01N21/3586 主分类号 G01N21/35
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