发明名称 CASSETTE-POSITIONING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a cassette-positioning device containing works which is capable of positioning a placed cassette, and making the cassette recover its initially placed position, when the positioning operation is canceled. SOLUTION: The cassette-positioning device is equipped with a base mount 3, a cassette-placing member 5 where the cassette CS1 supported by the base mount 3 is placed, a friction-reducing means 7 which is capable of reducing the friction between the base mount 3 and the cassette-placing member 5, a cassette-placing member positioning means 9 which positions the cassette-placing member 5 to the base mount 3 using an actuator 35, and a cassette-positioning means 11 which positions the cassette CS1 placed on the cassette member 5 to the base mount 3, together with the cassette placing member 5. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006135134(A) 申请公布日期 2006.05.25
申请号 JP20040323316 申请日期 2004.11.08
申请人 SUNSAY INTERNATIONAL TECHNOLOGY:KK 发明人 YAMAZAKI HAJIME
分类号 H01L21/68;B23P19/00;H01L21/673 主分类号 H01L21/68
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