| 摘要 |
PROBLEM TO BE SOLVED: To facilitate taking out a substrate from a substrate holder for chucking the substrate on the chucking surface. SOLUTION: The holder has a holder base 2 for mounting and holding a plate-like substrate on a suction area formed on the upside to contact with the substrate backside, and a suction route 33, communicating with a first opening 11 opened at the vacuuming area of the holder base 2 and a suction unit for sucking the substrate on the suctioning area. It comprises a blow out route 34, communicating with a second opening 12 opened at a partial area on the holder base 2 suction area, a blow out air feeder 30 for blowing out air from the second opening 12 through the blow out route 34 for tilting and floating up enough so as to move the substrate due to its tilt, thereby separating the partial area of the substrate away from the holder base 2 surface, and a 13 on the holder base 2 for locking the substrate 100 that moves along the suction area, at a position of unlocking at least a part of the substrate. COPYRIGHT: (C)2006,JPO&NCIPI |
